Akiyo Nagata

Statistics

Publications

Citations

192

H-Index

Active since

2013

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Akiyo Nagata is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, applied physics, and materials engineering.

Top concepts

EngineeringApplied PhysicsMaterials EngineeringElectrical EngineeringMicroelectronicsMaterial ScienceMicrostructureSemiconductorsNanoelectronicsSurface Science

Publications per year

2013–2017

Publications

First experimental demonstration of SiC super-junction (SJ) structure by multi-epitaxial growth method

Ryoji Kosugi, Yuuki Sakuma, Kazutoshi Kojima et al. · 2014 · 79 citations

Engineering, First Experimental Demonstration, Multi-epitaxial Growth Method +18

Development of SiC Super-Junction (SJ) Device by Deep Trench-Filling Epitaxial Growth

Ryoji Kosugi, Yuuki Sakuma, Kazutoshi Kojima et al. · Materials science forum · 2013 · 31 citations

Materials Engineering, Super Junction, Electrical Engineering +10

Development of SiC Super-Junction (SJ) Devices by Multi-Epitaxial Growth

Ryoji Kosugi, Yuuki Sakuma, Kazutoshi Kojima et al. · Materials science forum · 2014 · 25 citations

Materials Engineering, Electrical Engineering, Epitaxial Growth +12

4H-SiC Homoepitaxial Growth on Substrate with Vicinal Off-Angle Lower than 1°

Kazutoshi Kojima, K. Masumoto, Sachiko Ito et al. · ECS Journal of Solid State Science and Technology · 2013 · 20 citations

Materials Science, Materials Engineering, Electrical Engineering +14

An empirical growth window concerning the input ratio of HCl/SiH<sub>4</sub>gases in filling 4H-SiC trench by CVD

Shiyang Ji, Ryoji Kosugi, Kazutoshi Kojima et al. · Applied Physics Express · 2017 · 19 citations

Materials Science, Materials Engineering, 4H-sic Trench Filling +11

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