Nguyen Mai Phuong

Effect of Chromium Concentration on the Electrical Properties of NiCr Thin Films Resistor Deposited at Room Temperature by Magnetron Cosputtering Technique

Nguyen Mai Phuong, Dongjin Kim, Byoung-Don Kang et al. · Journal of The Electrochemical Society · 2005 · 27 citations

Nicr Films, Engineering, Chemistry +17

Effects of Adsorbed Moisture in SiO₂ Substrates on the Formation of a Mn Oxide Layer by Chemical Vapor Deposition

Nguyen Mai Phuong, Koji Neishi, Yuji Sutou et al. · The Journal of Physical Chemistry C · 2011 · 26 citations

Materials Science, Chemical Engineering, Cvd Mn +11

Diffusion barrier property of MnSixOy layer formed by chemical vapor deposition for Cu advanced interconnect application

Nguyen Mai Phuong, Yuji Sutou, Junichi Koike · Thin Solid Films · 2015 · 20 citations

Materials Science, Materials Engineering, Diffusion Barrier Property +12

Structural and Electrical Properties of NiCr Thin Films Annealed at Various Temperatures in a Vacuum and a Nitrogen Ambient for π-Type Attenuator Applications

Nguyen Mai Phuong, Dong-Jin Kim, Byoung-Don Kang et al. · Journal of The Electrochemical Society · 2006 · 12 citations · Full text

π-Type Attenuator Applications, Engineering, Thin Film Process Technology +17

Effect of annealing temperature on structural and electrical properties of tantalum nitride thin film resistors deposited on SiO2∕Si substrates by dc sputtering technique

Nguyễn Duy Cường, Nguyen Mai Phuong, Dong-Jin Kim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 12 citations

Engineering, Thin Film Resistors, Thin Film Process Technology +21