Concepedia

Yi-Jung Kim

YK

Statistics

Publications

1

Citations

11

H-Index

1

Active since

2009

Yi-Jung Kim is an author specializing in semiconductor devices, wet chemical etching, and plasma cleaning.

ORCID

Publications per year

2009–2009

1

Publications

1

Novel Single-Wafer Single-Chamber Dry and Wet Hybrid System for Stripping and <i>In Situ</i> Cleaning of High-Dose Ion-Implanted Photoresists

Takeshi Hattori, Yi-Jung Kim, Changro Yoon et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 11 citations

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