Z. Nényei - Concepedia

Author

Z. Nényei

Also Known As

Z Nenyei, Z. Nenyei, Z. Nényei, Zsolt Nenyei, Zsolt Nényei

Publications

171

Citations

H-Index

Concepts

All Affiliations

Z. Nényei is an author at Mattson Technology (Germany) specializing in engineering, electrical engineering, and heat transfer.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	96
2	Electrical Engineering	3	3	64
3	Materials Science	3	3	51
4	Applied Physics	2	2	37
5	Materials Engineering	1	1	16

Z. Nényei

Publications

Citations

H-Index

Page 1

	Year	Citations
loth IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 J. Gelpey, Bo Lojek, Z. Nényei, Electrical EngineeringEngineeringThermal ManagementThermal AnalysisRtp 2002	2002	29
Challenges for ultra-shallow junction formation technologies beyond the 90 nm node P. J. Timans, W. Lerch, S. Paul, Materials ScienceElectrical EngineeringEngineeringPhysicsNanoelectronics	2004	21
Growth model for thin oxides and oxide optimization A. Ludsteck, Jörg Schulze, I. Eisele, Journal of Applied Physics Materials ScienceMaterials EngineeringEngineeringGrowth ModelOxide Electronics	2004	16
Gas Flow Engineering in Rapid Thermal Processing Z. Nényei, H. Sommer, Jeffrey C. Gelpey, MRS Proceedings EngineeringHeat Transfer EnhancementGas Flow EngineeringHeat TransferGas-liquid Flow	1994	16
Defect‐Guarded Rapid Thermal Processing Z. Nényei, H. Walk, T. Knarr Journal of The Electrochemical Society Materials ScienceWafer RotationElectrical EngineeringEngineeringMultiple Bank Control	1993	14

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