Concepedia

Z. Nényei

ZN

5

Publications

96

Citations

5

H-Index

1993

Active since

Affiliations

Mattson Technology (Germany)(Current)

Z. Nényei is an author at Mattson Technology (Germany) specializing in engineering, electrical engineering, and heat transfer.

Top concepts

EngineeringHeat TransferMaterial ScienceThermal EngineeringElectrical EngineeringApplied PhysicsThermal ModelingThermal ManagementPhysicsRefrigeration

Publications per year

1993–2004

5

Publications

5

loth IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002

J. Gelpey, Bo Lojek, Z. Nényei et al. · 2002 · 29 citations

Electrical Engineering, Engineering, Thermal Management +8

Challenges for ultra-shallow junction formation technologies beyond the 90 nm node

P. J. Timans, W. Lerch, S. Paul et al. · 2004 · 21 citations

Materials Science, Electrical Engineering, Engineering +12

Growth model for thin oxides and oxide optimization

A. Ludsteck, Jörg Schulze, I. Eisele et al. · Journal of Applied Physics · 2004 · 16 citations

Materials Science, Materials Engineering, Engineering +11

Gas Flow Engineering in Rapid Thermal Processing

Z. Nényei, H. Sommer, Jeffrey C. Gelpey et al. · MRS Proceedings · 1994 · 16 citations

Engineering, Heat Transfer Enhancement, Gas Flow Engineering +4

Defect‐Guarded Rapid Thermal Processing

Z. Nényei, H. Walk, T. Knarr · Journal of The Electrochemical Society · 1993 · 14 citations

Materials Science, Wafer Rotation, Electrical Engineering +13

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