Concepedia

Shigeto Kohda

SK

Statistics

Publications

2

Citations

154

H-Index

2

Active since

1988

Affiliations

NTT (Japan)(Current)

Shigeto Kohda is an author at NTT (Japan) specializing in engineering, applied physics, and surface science.

Top concepts

Publications per year

1988–1988

2

Publications

2

Characteristics of offset-structure polycrystalline-silicon thin-film transistors

Keiji Tanaka, Hiroyuki Arai, Shigeto Kohda · IEEE Electron Device Letters · 1988 · 136 citations

, , +10

Effect of ammonia plasma treatment on plasma deposited silicon nitride films/silicon interface characteristics

Hitoshi Arai, Keiji Tanaka, Shigeto Kohda · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 18 citations

, , +11

1–2 of 2