Wei W. Lee

Pulsed plasma polymerization of pentafluorostyrene: Synthesis of low dielectric constant films

Licheng M. Han, Richard B. Timmons, Wei W. Lee et al. · Journal of Applied Physics · 1998 · 83 citations

Natural Sciences, Materials Engineering, Materials Science +17

Pulsed plasma polymerization of an aromatic perfluorocarbon monomer: Formation of low dielectric constant, high thermal stability films

Licheng M. Han, Richard B. Timmons, Wei W. Lee · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +14

Hydrogen-atom assisted CVD of copper at low temperatures and in-situ gas-phase spectroscopy studies

Wei W. Lee, Peter S. Locke · Thin Solid Films · 1995 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +11

Fabrication Of 0.06 /spl mu/m Poly-si Gate Using Duv Lithography With A Designed Si/sub x/O/sub y/N/sub z/ Film As An Arc And Hardmask

Wei W. Lee, Qizhi He, Hanratty et al. · Symposium on VLSI Technology · 1997 · 12 citations

Engineering, Electrical Engineering, Materials Science +12