Shigemitsu Maruno - Concepedia

Author

Shigemitsu Maruno

Mitsubishi Electric (Japan)

Also Known As

S. MARUNO, S. Maruno, Shigemitsu MARUNO, Shigemitsu Maruno

Publications

630

Citations

H-Index

Concepts

All Affiliations

Mitsubishi Electric (Japan)Mitsubishi Electric (Germany)Osaka Electro-Communication University Sakai Chemical Industry (Japan)Air Water (Japan)

About

Shigemitsu Maruno is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	19	484
2	Applied Physics	13	19	475
3	Electrical Engineering	5	5	140
4	Materials Engineering	2	2	96
5	Chemistry	1	1	34

Shigemitsu Maruno

Publications

494

Citations

H-Index

Page 1

	Year	Citations
Model of leakage characteristics of (Ba, Sr)TiO3 thin films Shigemitsu Maruno, Takeharu Kuroiwa, N. Mikami, Applied Physics Letters Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringPt Electrodes	1998	84
Nanostructure fabrication using the selective thermal desorption of SiO2 induced by electron beams S. Fujita, Shigemitsu Maruno, H. Watanabe, Applied Physics Letters EngineeringElectron BeamsSilicon On InsulatorSelective Thermal DesorptionNanoscale Chemistry	1996	63
A combined apparatus of scanning reflection electron microscope and scanning tunneling microscope Shigemitsu Maruno, Hiroyuki Nakahara, S. Fujita, Review of Scientific Instruments EngineeringMicroscopyNanoengineeringTunneling MicroscopyMicroscopy Method	1997	35
Nanofabrication using selective thermal desorption of SiO2/Si induced by electron beams S. Fujita, Shigemitsu Maruno, H. Watanabe, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringThin Film Process TechnologyElectron BeamsSilicon On InsulatorSelective Thermal Desorption	1997	34
Observation of oxide/Si(001)-interface during layer-by-layer oxidation by scanning reflection electron microscopy S. Fujita, Heiji Watanabe, Shigemitsu Maruno, Applied Physics Letters Materials ScienceSurface CharacterizationLayer-by-layer OxidationEngineeringTerrace Contrast	1997	34
Selective thermal decomposition of ultrathin silicon oxide layers induced by electron-stimulated oxygen desorption Heiji Watanabe, S. Fujita, Shigemitsu Maruno, Applied Physics Letters EngineeringUltrathin SiliconVolatile OxideSilicon On InsulatorSemiconductors	1997	31
Gas source MBE growth of InP Yoshitaka Morishita, Shigemitsu Maruno, Mitsunobu Gotoda, Journal of Crystal Growth EngineeringCrystal Growth TechnologyApplied PhysicsMolecular Beam EpitaxyChemical Kinetics	1989	26
Threshold height for movement of C60 molecules on Si(111)-7×7 with a scanning tunneling microscope Shigemitsu Maruno, K. Inanaga, Toshiro Isu Applied Physics Letters Intentional MovementC60 MoleculesEngineeringElectronic MaterialsPhysics	1993	22
Electron-Beam-Induced Selective Thermal Decomposition of Ultrathin SiO<sub>2</sub> Layers Used in Nanofabrication Heiji Watanabe, S. Fujita, Shigemitsu Maruno, Japanese Journal of Applied Physics Materials ScienceMaterial AnalysisEngineeringNanoscale ChemistryNanomaterials	1997	20
Drivability improvement on deep-submicron MOSFETs by elevation of source/drain regions Satoshi Yamakawa, Kenya Sugihara, T. Furukawa, IEEE Electron Device Letters Device ModelingElectrical EngineeringEngineeringDrivability ImprovementNanoelectronics	1999	19

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