Concepedia

Shigemitsu Maruno

SM

20

Publications

494

Citations

14

H-Index

1987

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Osaka Electro-Communication University

Sakai Chemical Industry (Japan)

Air Water (Japan)

Shigemitsu Maruno is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceNanoelectronicsMicroelectronicsNanotechnologyPhysicsNanofabricationElectrical Engineering

Publications per year

1987–2002

20

Publications

20

Model of leakage characteristics of (Ba, Sr)TiO3 thin films

Shigemitsu Maruno, Takeharu Kuroiwa, N. Mikami et al. · Applied Physics Letters · 1998 · 84 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Nanostructure fabrication using the selective thermal desorption of SiO2 induced by electron beams

S. Fujita, Shigemitsu Maruno, H. Watanabe et al. · Applied Physics Letters · 1996 · 63 citations

Engineering, Electron Beams, Silicon On Insulator +18

A combined apparatus of scanning reflection electron microscope and scanning tunneling microscope

Shigemitsu Maruno, Hiroyuki Nakahara, S. Fujita et al. · Review of Scientific Instruments · 1997 · 35 citations

Engineering, Microscopy, Nanoengineering +22

Nanofabrication using selective thermal desorption of SiO2/Si induced by electron beams

S. Fujita, Shigemitsu Maruno, H. Watanabe et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 34 citations

Engineering, Thin Film Process Technology, Electron Beams +19

Observation of oxide/Si(001)-interface during layer-by-layer oxidation by scanning reflection electron microscopy

S. Fujita, Heiji Watanabe, Shigemitsu Maruno et al. · Applied Physics Letters · 1997 · 34 citations

Materials Science, Surface Characterization, Layer-by-layer Oxidation +14

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