W. Lukaszek

Test chip based approach to automated diagnosis of CMOS yield problems

W. Lukaszek, K.G. Grambow, Willie J. Yarbrough · IEEE Transactions on Semiconductor Manufacturing · 1990 · 29 citations

Fault Diagnosis, Engineering, Mem Testing +19

Plasma model for charging damage

M.C. Vella, W. Lukaszek, Michael Current et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 14 citations

Plasma Model, Engineering, Physics +5

Quantifying Wafer Charging During Via Etch

W. Lukaszek, A. Birrell · 2005 · 12 citations

Engineering, Energy Efficiency, Charge Transport +19

Charging studies using the CHARM2 wafer surface charging monitor

W. Lukaszek, William Dixon, Elgin Quek et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 12 citations

Characterization of wafer charging mechanisms and oxide survival prediction methodology

W. Lukaszek, William Dixon, M.C. Vella et al. · 1994 · 11 citations

J-v Relationship, Engineering, Plasma Physics +19