Concepedia

Babak Shokouhi

BS

Statistics

Publications

3

Citations

54

H-Index

3

Active since

2011

Affiliations

University of Waterloo(Current)

Babak Shokouhi is an author at University of Waterloo specializing in materials science, materials engineering, and electron beam lithography.

ORCID

Publications per year

2011–2014

3

Publications

3

Very high sensitivity ZEP resist using MEK:MIBK developer

Babak Shokouhi, Jian Zhang, Bo Cui · Micro & Nano Letters · 2011 · 21 citations

, , +13

Tilted nanostructure fabrication by electron beam lithography

Jian Zhang, Babak Shokouhi, Bo Cui · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 19 citations

, , +10

Water soluble and metal-containing electron beam resist poly(sodium 4-styrenesulfonate)

Arwa Saud Abbas, Sondos Abdullah Alqarni, Babak Shokouhi et al. · Materials Research Express · 2014 · 14 citations

, , +17

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