S. A. Datar

Depth profiling analysis of semiconductor materials by accelerator mass spectrometry

Floyd D. McDaniel, J. Anthony, S. N. Renfrow et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 17 citations

Accelerator Mass Spectrometry, Physics, Analytical Instrumentation +10

AMS studies of the diffusion of chlorine in silicon wafers

S. A. Datar, H. E. Gove, R. Teng et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 15 citations

TEAMS depth profiles in semiconductors

S. A. Datar, S. N. Renfrow, B. N. Guo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 14 citations

Project Management, Management, Business +3

Applications of AMS to electronic and silver halide imaging research

H. E. Gove, Peter W. Kubik, P. Sharma et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 13 citations · Full text

Optical Materials, Engineering, Nuclear Physics +26

Low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry

Floyd D. McDaniel, S. A. Datar, B. N. Guo et al. · Applied Physics Letters · 1998 · 11 citations

Engineering, Teams Measurement, Measurement +19