Kenichi Takahara

Low Temperature Poly-Si TFTs Using Solid Phase Crystallization of Very Thin Films and an Electron Cyclotron Resonance Chemical Vapor Deposition Gate Insulator

Thomas W. Little, Kenichi Takahara, Hideki Koike et al. · Japanese Journal of Applied Physics · 1991 · 57 citations

Engineering, Channel Si Layer, Integrated Circuits +16

Vibration control of truss beam structures using axial force actuators

M. C. Natori, S. Motohashi, Kenichi Takahara et al. · 29th Structures, Structural Dynamics and Materials Conference · 1988 · 21 citations

Space Station Structures, Engineering, Aerospace Engineering +14

Docking/separation test of two-dimensional truss structure with variable geometries

Hiroshi Furuya, Fumihiro Kuwao, Kenichi Takahara · 31st Structures, Structural Dynamics and Materials Conference · 1990 · 20 citations

Space Vehicle, Engineering, Mechanical Engineering +17

Study of EUV mask inspection technique using DUV light source for hp22nm and beyond

Ryoichi Hirano, Nobutaka Kikuiri, H Hashimoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

Engineering, Electron-beam Lithography, Optical Testing +16

A novel defect detection optical system using 199-nm light source for EUVL mask

Ryoichi Hirano, Nobutaka Kikuiri, Masatoshi Hirono et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations

Optical Materials, Engineering, Electron-beam Lithography +18