Concepedia

Nobutaka Kikuiri

NK

3

Publications

45

Citations

3

H-Index

2010

Active since

Nobutaka Kikuiri is an author specializing in optical engineering, computer engineering, and optoelectronics.

Top concepts

EngineeringOphthalmologyOptoelectronicsOptical EngineeringComputer EngineeringInstrumentationOptical DiagnosticsPhotonicsRadiologyInspection

Publications per year

2010–2012

3

Publications

3

Development of a new mask pattern inspection tool NPI-7000 and applied results to EUV mask inspection

H Hashimoto, Nobutaka Kikuiri, Ikunao Isomura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 18 citations

Euv Mask Inspection, Image Analysis, Inspection +15

Study of EUV mask inspection technique using DUV light source for hp22nm and beyond

Ryoichi Hirano, Nobutaka Kikuiri, H Hashimoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

Engineering, Electron-beam Lithography, Optical Testing +16

A novel defect detection optical system using 199-nm light source for EUVL mask

Ryoichi Hirano, Nobutaka Kikuiri, Masatoshi Hirono et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations

Optical Materials, Engineering, Electron-beam Lithography +18

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