Nobutaka Kikuiri - Concepedia

Author

Nobutaka Kikuiri

Also Known As

N. Kikuiri, Nobutaka KIKUIRI, Nobutaka Kikuiri

Publications

117

Citations

H-Index

Concepts

Nobutaka Kikuiri is an author specializing in optical engineering, computer engineering, and optoelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	45
2	Computer Engineering	3	3	45
3	Optical Engineering	3	3	45
4	Electrical Engineering	1	1	17
5	Image Analysis	1	1	18

Nobutaka Kikuiri

Publications

Citations

H-Index

Page 1

	Year	Citations
Development of a new mask pattern inspection tool NPI-7000 and applied results to EUV mask inspection H Hashimoto, Nobutaka Kikuiri, Ikunao Isomura, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Euv Mask InspectionImage AnalysisInspectionOphthalmologyEngineering	2012	18
Study of EUV mask inspection technique using DUV light source for hp22nm and beyond Ryoichi Hirano, Nobutaka Kikuiri, H Hashimoto, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyOptical TestingBeam LithographyOptical Diagnostics	2010	17
A novel defect detection optical system using 199-nm light source for EUVL mask Ryoichi Hirano, Nobutaka Kikuiri, Masatoshi Hirono, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyOptical TestingEuvl Mask	2010	10

Page 1