Concepedia
Statistics
Publications
1
Citations
18
H-Index
Active since
2012
Ikunao Isomura is an author specializing in thin film lithography, mask inspection, and contrast enhancement.
Publications per year
2012–2012
Development of a new mask pattern inspection tool NPI-7000 and applied results to EUV mask inspection
H Hashimoto, Nobutaka Kikuiri, Ikunao Isomura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +14
1–1 of 1