Concepedia

Y. Kashiwazaki

YK

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Publications

2

Citations

55

H-Index

2

Active since

1997

Affiliations

Kyushu University(Current)

Y. Kashiwazaki is an author at Kyushu University specializing in applied physics, thin films, and microelectronics.

Top concepts

Publications per year

1997–1997

2

Publications

2

Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma

Dawei Gao, Y. Kashiwazaki, K. Muraoka et al. · Journal of Applied Physics · 1997 · 31 citations

, , +16

Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

H. Nakashima, Kuniyuki Furukawa, Y. C. Liu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 24 citations

, , +17

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