Laser Thomson scattering for low-temperature plasmas

K. Muraoka, A. Kono

Journal of Physics D Applied Physics

EngineeringLaser-plasma InteractionLaser Plasma PhysicPlasma SciencePlasma Physics +16

Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma

Tsukasa Hori, M. Bowden, Kenji Uchino, +2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Electron DensityEngineeringPhysicsNeutral DensityApplied Plasma Physic +12

Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

M. Bowden, T. Okamoto, Fumio Kimura, +8

Journal of Applied Physics

EngineeringPlasma SciencePlasma PhysicsElectron PhysicPlasma Electronics +17

A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

Tsukasa Hori, M. Kogano, M. Bowden, +2

Journal of Applied Physics

Electrical EngineeringNon-maxwellian EedfsEngineeringPhysicsApplied Physics +9

Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

Tsukasa Hori, M. Bowden, Kenji Uchino, +1

Applied Physics Letters

Electrical EngineeringEngineeringPhysicsPlasma TheoryApplied Physics +10

Measurement method for electric fields based on Stark spectroscopy of argon atoms

H. J. Kim, T. Ikutake, J. B. Kim, +3

Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics

EngineeringAtomic Emission SpectroscopyAbsorption SpectroscopyPlasma PhysicsElectron Spectroscopy +14

A Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

M. Bowden, Y Goto, H Yanaga, +3

Plasma Sources Science and Technology

Processing PlasmasEngineeringMeasurementLaser-plasma InteractionPlasma Science +15

Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques

M. Bowden, M. Kogano, Y. Suetome, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Langmuir ProbeElectrical EngineeringLaser ThomsonReliable Laser MethodPhysics +12

Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma

Dawei Gao, Y. Kashiwazaki, K. Muraoka, +5

Journal of Applied Physics

EngineeringSi OxidePlasma ProcessingLow TemperatureChemical Engineering +14

Studies on the optimum condition for the formation of a neutral loop discharge plasma

Yonmo Sung, Kenji Uchino, K. Muraoka, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Electrical EngineeringRf Electric FieldEngineeringApplied Plasma PhysicElectron Behavior +9