Concepedia

Author

Y. C. Liu

Kyushu University

Also Known As

Y. C. Liu

2

Publications

55

Citations

2

H-Index

15

Concepts

All Affiliations

Kyushu University
YC

About

Y. C. Liu is an author at Kyushu University specializing in applied physics, thin films, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

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55

2

Applied Physics

2

2

55

3

Natural Sciences

1

1

24

4

Chemical Engineering

1

1

31

5

Materials Engineering

1

1

31

Y. C. Liu

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2

Publications

55

Citations

2

H-Index

YearCitations

Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma

Dawei Gao, Y. Kashiwazaki, K. Muraoka,

Journal of Applied Physics

1997

31

Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

H. Nakashima, Kuniyuki Furukawa, Y. C. Liu,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1997

24

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