Concepedia

H.-K. Cho

HC

Statistics

Publications

2

Citations

32

H-Index

2

Active since

2010

Affiliations

Auburn University(Current)

Samsung (South Korea)

H.-K. Cho is an author at Auburn University specializing in engineering, electrical engineering, and electron beam lithography.

ORCID

Publications per year

2010–2011

2

Publications

2

Estimation of resist profile for line/space patterns using layer-based exposure modeling in electron-beam lithography

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2010 · 19 citations

, , +8

Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2011 · 13 citations

, , +15

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