Concepedia
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Publications
2
Citations
28
H-Index
Active since
1998
Warren P. Fan is an author specializing in critical dimension control, microfabrication, and manufacturing.
Publications per year
1998–1998
The optimization and characterization of ultra-thick photoresist films
Warren W. Flack, Warren P. Fan, Sylvia White · Advances in resist technology and processing. Conference · 1998 · 15 citations
Engineering, Materials Engineering, Materials Science +17
Optimization and characterization of ultrathick photoresist films
Warren W. Flack, Warren P. Fan, Sylvia White · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 13 citations
Natural Sciences, Materials Engineering, Materials Science +16
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