Kouichi Tamagawa - Concepedia

Author

Kouichi Tamagawa

Also Known As

K. Tamagawa, Kouichi TAMAGAWA, Kouichi Tamagawa, Kouichi Tamagawa Kouichi Tamagawa

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Citations

H-Index

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Kouichi Tamagawa is an author at Ulvac (Japan) specializing in applied physics, engineering, and optoelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	28
2	Applied Physics	2	2	28
3	Chemical Engineering	1	1	13
4	Chemistry	1	1	15
5	Electrical Engineering	1	1	15

Kouichi Tamagawa

Publications

Citations

H-Index

Page 1

	Year	Citations
Photo-Ionizalion Assisted Photo-CVD of Silicon Nitride Film by Microwave-Excited Deuterium Lamp Kouichi Tamagawa, Toshio Hayashi, S. Komiya Japanese Journal of Applied Physics EngineeringMicrowave-excited Deuterium LampSilicon Nitride FilmOptoelectronic DevicesIntegrated Circuits	1986	15
Low-Temperature Silicon Epitaxial Growth by Photochemical Vapor Deposition Using Vacuum Ultraviolet Light Narishi Gonohe, Saburo Shimizu, Kouichi Tamagawa, Japanese Journal of Applied Physics Vuv Light IrradiationChemical EngineeringOptical MaterialsEngineeringPhysics	1987	13

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