M. Ino

Electrical and Crystallographic Properties of Sputtered-Pb(Zr, Ti)O₃ Films Treated by Rapid Thermal Annealing

Satoshi Yamauchi, Hiroyuki Tamura, Masaki Yoshimaru et al. · Japanese Journal of Applied Physics · 1993 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17

Rugged surface polycrystalline silicon film deposition and its application in a stacked dynamic random access memory capacitor electrode

M. Ino, J. Miyano, H. Kurogi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Silicon nitride thin-film deposition by LPCVD with in situ HF vapor cleaning and its application to stacked DRAM capacitor fabrication

M. Ino, Noriyuki Inoue, Masaki Yoshimaru · IEEE Transactions on Electron Devices · 1994 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Analysis of defects in thin SiO<inf>2</inf>thermally grown on Si substrate

Hitoshi Abe, Fumio Kiyosumi, Katsunari Yoshioka et al. · 1985 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

Rugged surface poly-Si electrode and low temperature deposited Si/sub 3/N/sub 4/ for 64 Mbit and beyond STC DRAM cell

Masaki Yoshimaru, J. Miyano, Noriyuki Inoue et al. · 2002 · 19 citations

Engineering, Materials Engineering, Materials Science +17