18
Publications
924
Citations
14
H-Index
1979
Active since
Affiliations
Takahiro Kitano is an author at Tokyo Electron (Japan) specializing in engineering, materials science, and self-assembly.
Top concepts
EngineeringMaterial ScienceSelf-assemblyApplied PhysicsMicrofabrication3D PrintingNanofabricationPolymer ScienceMicroelectronicsPattern Formation
Publications per year
1979–2024
18
18
Tamaki Mabuchi, Shinji Matsumura, Emiko Okuda‐Ashitaka et al. · European Journal of Neuroscience · 2003 · 100 citations
Pattern scaling with directed self assembly through lithography and etch process integration
Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations
Engineering, Electron-beam Lithography, Pattern Transfer +24
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