M. Shibuya

Structure and Properties of Silicon Titanium Oxide Films Prepared by Plasma-Enhanced Chemical Vapor Deposition Method

Takeshi Kamada, Masatoshi Kitagawa, M. Shibuya et al. · Japanese Journal of Applied Physics · 1991 · 47 citations

Engineering, Chemical Deposition, Silicon On Insulator +16

Advanced GaAs-MMIC process technology using high-dielectric constant thin film capacitors by low-temperature RF sputtering method

M. Nishitsuji, A. Tamura, T. Kunihisa et al. · 2002 · 18 citations

Electrical Engineering, Semiconductor Device, Engineering +15

Total dose radiation effects on CMOS ring oscillators operating during irradiation

M. Shibuya · IEEE Electron Device Letters · 1983 · 14 citations

Engineering, Radiation Effect, Radiation Exposure +16

Substrate Potential Effects on Low-Temperature Preparation of SrTiO₃ Thin Films by RF Magnetron Sputtering

M. Shibuya, M. Nishitsuji, Masatoshi Kitagawa et al. · Japanese Journal of Applied Physics · 1993 · 12 citations

Engineering, Low-temperature Preparation, Thin Film Process Technology +16

CMOS logic circuit optimum design for radiation tolerance

M. Shibuya · Electronics Letters · 1983 · 11 citations

Electrical Engineering, Engineering, Vlsi Design +8