R. Turkot

Atomic Layer Etching: An Industry Perspective

C.T. Carver, John J. Plombon, Patricio E. Romero et al. · ECS Journal of Solid State Science and Technology · 2015 · 154 citations · Full text

Materials Science, Chemical Engineering, Engineering +14

Modeling of neutral hydrogen velocities in the Tokamak Fusion Test Reactor

D.P. Stotler, C. H. Skinner, R. Budny et al. · Physics of Plasmas · 1996 · 56 citations

Engineering, Nuclear Physics, Fusion Power +21

Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications

S. M. Rossnagel, C. A. Nichols, Satoshi Hamaguchi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 51 citations

Materials Science, Magnetism, Epitaxial Growth +15

Resistance and electromigration performance of 6 nm wires

J. S. Chawla, Seung-Hun Sung, Stephanie A. Bojarski et al. · 2016 · 29 citations

Engineering, Interconnect (Integrated Circuits), Wafer Scale Processing +17

Surface erosion issues and analysis for dissipative divertors

J.N. Brooks, D. N. Ruzic, D. B. Hayden et al. · Journal of Nuclear Materials · 1995 · 19 citations

Unsteady Flow, Engineering, Fluid Mechanics +4