Statistics
Publications
2
Citations
33
H-Index
2
Active since
2020
Affiliations
Zachary J. Biegler is an author at University of California, Santa Barbara specializing in materials science, semiconductor materials, and semiconductor device materials.
Publications per year
2020–2023
2
2
Atomic layer etching (ALE) of III-nitrides
Wan Ying Ho, Yi Chao Chow, Zachary J. Biegler et al. · Applied Physics Letters · 2023 · 16 citations · Full text
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