Concepedia

Mitsuo Matsumura

MM

7

Publications

437

Citations

7

H-Index

1980

Active since

Affiliations

Electrotechnical Institute(Current)

Mitsuo Matsumura is an author at Electrotechnical Institute specializing in engineering, applied physics, and thin films.

Top concepts

EngineeringApplied PhysicsPhysicsThin FilmsOptoelectronicsNanoelectronicsMaterial ScienceMicroelectronicsElectrical EngineeringSurface Science

Publications per year

1980–2003

7

Publications

7

Electrical and Structural Properties of Phosphorous-Doped Glow-Discharge Si:F:H and Si:H Films

Akihisa Matsuda, Satoshi Yamasaki, Katsumi Nakagawa et al. · Japanese Journal of Applied Physics · 1980 · 195 citations

Engineering, Glow Discharge, Phosphorous-doped Glow-discharge Si +17

Boron Doping of Hydrogenated Silicon Thin Films

Akihisa Matsuda, Mitsuo Matsumura, Satoshi Yamasaki et al. · Japanese Journal of Applied Physics · 1981 · 82 citations

Semiconductors, Boron Nitride, Electronic Devices +12

Plasma spectroscopy control and analysis of a-Si:H deposition

Akihisa Matsuda, Katsumi Nakagawa, Kazunobu Tanaka et al. · Journal of Non-Crystalline Solids · 1980 · 71 citations

Engineering, Physics, Natural Sciences +6

The role of argon involved in plasma-deposited amorphous Si:H films

Kazunobu Tanaka, Satoshi Yamasaki, Katsumi Nakagawa et al. · Journal of Non-Crystalline Solids · 1980 · 36 citations

Materials Science, Engineering, Physics +8

(Invited) Optical, Electrical and Structural Properties of Plasma-Deposited Amorphous Silicon

Kazunobu Tanaka, Katsumi Nakagawa, Akihisa Matsuda et al. · Japanese Journal of Applied Physics · 1981 · 28 citations · Full text

Optical Materials, Engineering, Plasma-deposited Amorphous Silicon +19

Rows per page

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