Plasma spectroscopy control and analysis of a-Si:H deposition - Concepedia

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Plasma spectroscopy control and analysis of a-Si:H deposition

71

Citations

3

References

1980

Year

Akihisa Matsuda, Katsumi Nakagawa, Kazunobu Tanaka, Mitsuo Matsumura, Satoshi Yamasaki, Hideyo Okushi, S. Iizima

Journal of Non-Crystalline Solids

EngineeringPhysicsNatural SciencesSpectroscopySurface ScienceApplied PhysicsSilicon On InsulatorPlasma Spectroscopy ControlPlasma Processing

References

	Year	Citations

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