Statistics
Publications
4
Citations
70
H-Index
4
Active since
1999
Affiliations
KLA (United States)(Current)
Kaustuve Bhattacharyya is an author at KLA (United States) specializing in electronic materials, materials science, and microfabrication.
Publications per year
1999–2018
4
4
Reticle surface contaminants and their relationship to sub-pellicle defect formation
Brian J. Grenon, Kaustuve Bhattacharyya, William W. Volk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +15
Formation and detection of subpellicle defects by exposure to DUV system illumination
Brian J. Grenon, Charles R. Peters, Kaustuve Bhattacharyya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 14 citations
Natural Sciences, Manufacturing Engineering, Materials Science +14
Multi-wavelength approach towards on-product overlay accuracy and robustness
Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen et al. · 2018 · 13 citations
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