Concepedia

Yasuo Itakura

YI

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Publications

1

Citations

16

H-Index

1

Active since

1996

Affiliations

Meidensha (Japan)(Current)

Yasuo Itakura is an author at Meidensha (Japan) specializing in optoelectronics, laser diodes, and engineering.

Publications per year

1996–1996

1

Publications

1

<title>High-power KrF excimer laser with a solid state switch for microlithography</title>

Hakaru Mizoguchi, Noritoshi Ito, Hiroaki Nakarai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 16 citations

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