Statistics
Publications
1
Citations
22
H-Index
1
Active since
2002
Affiliations
Toshiba (Japan)(Current)
Hidehiko Yabuhara is an author at Toshiba (Japan) specializing in surface characterization, dry oxidation, and wet oxidation.
Publications per year
2002–2002
1
1
Scanning capacitance microscopy measurements using diamond-coated probes
Hidehiko Yabuhara, Mauro Ciappa, Wolfgang Fichtner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +16
1–1 of 1