Concepedia

Mitsuo Yasaka

MY

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Publications

3

Citations

46

H-Index

3

Active since

2000

Affiliations

Kumamoto Industrial Research Institute(Current)

Mitsuo Yasaka is an author at Kumamoto Industrial Research Institute specializing in electrical engineering, arc discharges, and instrumentation.

Publications per year

2000–2013

3

Publications

3

Detection of Supersonic Waves Emitted from Anomalous Arc Discharge in Plasma Processing Equipment

Mitsuo Yasaka, M. Takeshita, Ryuji Miyagawa · Japanese Journal of Applied Physics · 2000 · 18 citations

, , +12

Micro Arc Monitoring by Detecting Charge Build-Up on Glass Surface of Viewing Port due to Plasma Dispersion in Plasma Processing Equipment

Mitsuo Yasaka, M. Takeshita, Ryuji Miyagawa · Japanese Journal of Applied Physics · 2003 · 15 citations

, , +15

Detection of Micro-Arc Discharge Using ESC Wafer Stage With Built-In AE Sensor

Yuji Kasashima, Tatsuo Tabaru, Yoshikazu Kobayashi et al. · IEEE Transactions on Semiconductor Manufacturing · 2013 · 13 citations

, , +15

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