Concepedia

Alexander N. Bykanov

AN

Statistics

Publications

14

Citations

312

H-Index

13

Active since

2001

Affiliations

Johnson University(Current)

Alexander N. Bykanov is an author at Johnson University specializing in natural sciences, plasma physics, and laser-plasma interactions.

Publications per year

2001–2012

14

Publications

14

Performance summary on a high power dense plasma focus x-ray lithography point source producing 70 nm line features in AlGaAs microcircuits

R. A. Petr, Alexander N. Bykanov, Jay Freshman et al. · Review of Scientific Instruments · 2004 · 42 citations

, , +9

LPP EUV source development for HVM

David C. Brandt, Igor V. Fomenkov, Alex I. Ershov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

, , +17

LPP source system development for HVM

David C. Brandt, Igor V. Fomenkov, Alex I. Ershov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 37 citations · Full text

, , +13

Laser-produced plasma light source for EUVL

Igor V. Fomenkov, Alex I. Ershov, William N. Partlo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 23 citations

, , +16

LPP EUV source development for HVM

Björn Hansson, Igor V. Fomenkov, N. Böwering et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 23 citations

, , +17

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