Statistics
Publications
1
Citations
15
H-Index
1
Active since
2002
F.S. Chen is an author specializing in thin films, integrated circuit design, and thin-film deposition.
Publications per year
2002–2002
1
1
Planarized aluminum metallization for sub-0.5 mu m CMOS technology
F.S. Chen, Yi Lin, Girish Dixit et al. · 2002 · 15 citations
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