S. Chevalliez

Breakthroughs in 3D Sequential technology

Laurent Brunet, C. Fenouillet-Béranger, P. Batude et al. · 2018 · 52 citations

Engineering, Electrical Engineering, Materials Science +13

Impact of area scaling on the ferroelectric properties of back-end of line compatible Hf0.5Zr0.5O2 and Si:HfO2-based MFM capacitors

T. François, L. Grenouillet, J. Coignus et al. · Applied Physics Letters · 2021 · 41 citations · Full text

Natural Sciences, Electrical Engineering, Materials Science +17

Nanosecond Laser Anneal (NLA) for Si-Implanted HfO2 Ferroelectric Memories Integrated in Back-End of Line (BEOL)

L. Grenouillet, T. François, J. Coignus et al. · 2020 · 34 citations

Engineering, Electrical Engineering, Materials Science +13

Carbon electrode for Ge-Se-Sb based OTS selector for ultra low leakage current and outstanding endurance

Anthonin Verdy, G. Navarro, M. Bernard et al. · 2018 · 31 citations

Engineering, Materials Engineering, Materials Science +17

BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions

Ruben Alcala, Monica Materano, Patrick D. Lomenzo et al. · IEEE Journal of the Electron Devices Society · 2022 · 26 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17