Concepedia

Mufei Yu

MY

Statistics

Publications

4

Citations

122

H-Index

4

Active since

2014

Affiliations

Cornell University(Current)

Mufei Yu is an author at Cornell University specializing in materials engineering, materials science, and natural sciences.

Publications per year

2014–2016

4

Publications

4

Metal Oxide Nanoparticle Photoresists for EUV Patterning

Jing Jiang, Souvik Chakrabarty, Mufei Yu et al. · Journal of Photopolymer Science and Technology · 2014 · 62 citations · Full text

, , +16

Oxide Nanoparticle EUV (ONE) Photoresists: Current Understanding of the Unusual Patterning Mechanism

Jing Jiang, Ben Zhang, Mufei Yu et al. · Journal of Photopolymer Science and Technology · 2015 · 27 citations · Full text

, , +12

Recent progress in nanoparticle photoresists development for EUV lithography

Kazuki Kasahara, Vasiliki Kosma, Jérémy Odent et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 23 citations

, , +16

Positive Tone Nanoparticle Photoresists: New Insight on the Patterning Mechanism

Mufei Yu, Hong Xu, Vasiliki Kosma et al. · Journal of Photopolymer Science and Technology · 2016 · 10 citations · Full text

, , +10

1–4 of 4