Concepedia

Joseph Z. Xie

JZ

3

Publications

74

Citations

3

H-Index

1988

Active since

Affiliations

Rensselaer Polytechnic Institute(Current)

University at Albany, State University of New York

Joseph Z. Xie is an author at Rensselaer Polytechnic Institute specializing in applied physics, engineering, and thin films.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceHydrogenSurface ScienceSemiconductorsSolid MechanicsChemical EngineeringElectronic Packaging

Publications per year

1988–1998

3

Publications

3

Stability of hydrogen in silicon nitride films deposited by low-pressure and plasma enhanced chemical vapor deposition techniques

Joseph Z. Xie, S. P. Murarka, Xin Guo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 40 citations

Materials Science, Semiconductors, Engineering +14

Channel Cracking Technique for Toughness Measurement of Brittle Dielectric Thin Films on Silicon Substrates

Qing Ma, Joseph Z. Xie, Sam Chao et al. · MRS Proceedings · 1998 · 19 citations

Materials Science, Engineering, Channel Cracking Technique +13

An investigation of hydrogen concentration profiles in as-deposited and annealed chemical vapor deposited SiO2 films

Joseph Z. Xie, S. P. Murarka, Xin Guo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 15 citations

Materials Science, Chemical Engineering, Engineering +15

Rows per page

1–3 of 3