Concepedia

Srinivasan Sivaram

SS

Statistics

Publications

2

Citations

25

H-Index

2

Active since

1986

Affiliations

Rensselaer Polytechnic Institute(Current)

Srinivasan Sivaram is an author at Rensselaer Polytechnic Institute specializing in applied physics, engineering, and materials engineering.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringMicrostructureMicroelectronicsMicrofabricationChemical Engineering

Publications per year

1986–1993

2

Publications

2

Comparison of mechanical and microstructural properties of hydrogen and silane reduced low pressure chemical vapor deposited tungsten films

Srinivasan Sivaram, M.L.A. Dass, Bryan Tracy et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 14 citations

Materials Engineering, Materials Science, Microstructural Properties +15

Dry etching of TiSi2

Ken Cadien, Srinivasan Sivaram, C. D. Reintsema · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 11 citations

Materials Science, Materials Engineering, Chemical Engineering +15

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