Stefan Bienholz

Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

Simon Steves, Tim Styrnoll, Felix Mitschker et al. · Journal of Physics D Applied Physics · 2013 · 38 citations

Optical Materials, Engineering, Radio Frequency +23

On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas

Stefan Bienholz, Tim Styrnoll, Peter Awakowicz · Journal of Physics D Applied Physics · 2014 · 37 citations

Electrical Engineering, Engineering, Physics +8

On the physics of a large CCP discharge

Denis Eremin, Stefan Bienholz, Daniel Szeremley et al. · Plasma Sources Science and Technology · 2016 · 33 citations

Electrical Engineering, Plasma Uniformity, Engineering +13

Multiple frequency capacitively coupled plasmas as a new technology for sputter processes

Stefan Bienholz, Nikita Bibinov, Peter Awakowicz · Journal of Physics D Applied Physics · 2013 · 25 citations

Electrical Engineering, Multiple Frequency, New Technology +12

Study on electrostatic and electromagnetic probes operated in ceramic and metallic depositing plasmas

Tim Styrnoll, Stefan Bienholz, Martin Lapke et al. · Plasma Sources Science and Technology · 2014 · 16 citations

Langmuir Probe, Engineering, Plasma Science +16