Concepedia

Horst Böhm

HB

Statistics

Publications

5

Citations

187

H-Index

5

Active since

1987

Affiliations

Siemens (Germany)(Current)

Horst Böhm is an author at Siemens (Germany) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringPhysicsCosmic RayPulse PowerSemiconductorsOptoelectronicsSurface Science

Publications per year

1987–1992

5

Publications

5

Influence of plasma deposition on structural and electronic properties of a-Ge:H

F. Karg, Horst Böhm, K. Pierz · Journal of Non-Crystalline Solids · 1989 · 71 citations

Materials Science, Plasma Electronics, Plasma Deposition +8

Analysis of Polysilicon Diffusion Sources

V. Probst, Horst Böhm, H. Schaber et al. · Journal of The Electrochemical Society · 1988 · 54 citations

Materials Science, Polysilicon Diffusion Sources, Engineering +10

Diffusion of B and As from polycrystalline silicon during rapid optical annealing

Horst Böhm, H. Wendt, H. Oppolzer et al. · Journal of Applied Physics · 1987 · 30 citations

Materials Science, Optical Materials, Engineering +14

The influence of electrode areas on radio frequency glow discharge

Wolfgang Kasper, Horst Böhm, B. Hirschauer · Journal of Applied Physics · 1992 · 17 citations

Electrical Engineering, Plasma Electronics, Engineering +10

Megaelectronvolt phosphorus implantation for bipolar devices

Horst Böhm, L. I. Bernewitz, Walter Böhm et al. · IEEE Transactions on Electron Devices · 1988 · 15 citations

Semiconductors, Materials Science, Electrical Engineering +15

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