Mark P. deGrandpre - Concepedia

Author

Mark P. deGrandpre

Also Known As

Mark P. deGrandpre, Mark deGrandpre

Publications

Citations

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Mark P. deGrandpre is an author at Hewlett-Packard (United States) specializing in physics, microelectronics, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	62
2	Applied Physics	2	2	62
3	Natural Sciences	1	1	17
4	Chemical Engineering	1	1	17
5	Chemistry	1	1	17

Mark P. deGrandpre

Publications

Citations

H-Index

Page 1

	Year	Citations
Characterization of a high-resolution novolak based negative electron-beam resist with 4 μC/cm2 sensitivity Huayu Liu, Mark P. deGrandpre, Wayne E. Feely Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Materials ScienceHigh-resolution NovolakProximity Effect CorrectionPhysicsMicrofabrication	1988	45
High Resolution, Novolak Based Negative Tone Electron Beam Resist Mark P. deGrandpre, Karen A. Graziano, Stephen D. Thompson, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE High ResolutionEngineeringElectron-beam LithographyElectron DiffractionChemistry	1988	17

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