Concepedia

Mark P. deGrandpre

MP

2

Publications

62

Citations

2

H-Index

1988

Active since

Affiliations

Hewlett-Packard (United States)(Current)

Mark P. deGrandpre is an author at Hewlett-Packard (United States) specializing in physics, microelectronics, and materials science.

Top concepts

PhysicsEngineeringApplied PhysicsMaterial ScienceMicroelectronicsChemistrySpectroscopyPhotochemistryOptoelectronicsMicrofabrication

Publications per year

1988–1988

2

Publications

2

Characterization of a high-resolution novolak based negative electron-beam resist with 4 μC/cm2 sensitivity

Huayu Liu, Mark P. deGrandpre, Wayne E. Feely · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 45 citations

Materials Science, High-resolution Novolak, Proximity Effect Correction +15

High Resolution, Novolak Based Negative Tone Electron Beam Resist

Mark P. deGrandpre, Karen A. Graziano, Stephen D. Thompson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 17 citations

High Resolution, Engineering, Electron-beam Lithography +21

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