Concepedia

G. A. Lincoln

GA

Statistics

Publications

13

Citations

591

H-Index

11

Active since

1981

Affiliations

MIT Lincoln Laboratory(Current)

Massachusetts Institute of Technology

G. A. Lincoln is an author at MIT Lincoln Laboratory specializing in engineering, materials science, and etching processes.

Publications per year

1981–2003

13

Publications

13

A novel anisotropic dry etching technique

M. W. Geis, G. A. Lincoln, N. N. Efremow et al. · Journal of Vacuum Science and Technology · 1981 · 118 citations

Engineering, Materials Engineering, Materials Science +13

Effects of dry etching on GaAs

S. W. Pang, G. A. Lincoln, R.W. McClelland et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 107 citations

Engineering, Electrical Engineering, Materials Science +16

Ion-beam-assisted etching of diamond

N. N. Efremow, M. W. Geis, D. C. Flanders et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 103 citations

Engineering, Materials Engineering, Materials Science +11

Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy

G. A. Lincoln, M. W. Geis, S. W. Pang et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 62 citations

Engineering, Electrical Engineering, Materials Science +13

Effects of ion species and adsorbed gas on dry etching induced damage in GaAs

S. W. Pang, M. W. Geis, N. N. Efremow et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 53 citations

Engineering, Electrical Engineering, Materials Science +17

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