Statistics
Publications
1
Citations
10
H-Index
1
Active since
2003
Affiliations
ASML (Netherlands)(Current)
Ashok Khathuria is an author at ASML (Netherlands) specializing in thin film lithography, defocus, and microfabrication.
Publications per year
2003–2003
1
1
Bruno M. La Fontaine, Jan Hauschild, Mircea Dusa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations
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