Takanobu Ishihara

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 51 citations

Natural Sciences, Electrical Engineering, Physics +12

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 38 citations

Natural Sciences, Physics, Optoelectronics +9

Ontogenic development of EEG-asymmetry in early infantile autism

Teruyuki Ogawa, Akio Sugiyama, Shun Ishiwa et al. · Brain and Development · 1982 · 33 citations

Medicine, Neuroscience, Pediatrics +12

Ontogenic development of autoregressive component waves of waking EEG in normal infants and children

Teruyuki Ogawa, Akio Sugiyama, Shun Ishiwa et al. · Brain and Development · 1984 · 20 citations

Life Sciences, Neurology, Neuroscience +15

Laser-produced plasma source development for EUV lithography

Akira Endo, Hiroshi Komori, Yoshifumi Ueno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations

Natural Sciences, Materials Science, Physics +15