Concepedia

R. Sharangpani

RS

Statistics

Publications

6

Citations

188

H-Index

6

Active since

1995

Affiliations

Clemson University(Current)

R. Sharangpani is an author at Clemson University specializing in materials engineering, materials science, and natural sciences.

Publications per year

1995–2001

6

Publications

6

Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry

Yao Hu, R. Sharangpani, Sing-Pin Tay · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 61 citations

, , +16

In Situ Rapid Thermal Oxidation and Reduction of Copper Thin Films and Their Applications in Ultralarge Scale Integration

Yao Hu, R. Sharangpani, Sing-Pin Tay · Journal of The Electrochemical Society · 2001 · 42 citations

, , +17

Deposition of high dielectric constant materials by dual spectral sources assisted metalorganic chemical vapor deposition

Rahul Singh, S. Alamgir, R. Sharangpani · Applied Physics Letters · 1995 · 29 citations

, , +17

Chemical vapor deposition and characterization of amorphous teflon fluoropolymerthin films

R. Sharangpani, Rajendra Singh, Michael Drews et al. · Journal of Electronic Materials · 1997 · 22 citations

, , +14

How Rapid Isothermal Processing Can be a Dominant Semiconductor Processing Technology in the 21st Century

Rajendra Singh, R. Sharangpani, K. C. Cherukuri et al. · MRS Proceedings · 1996 · 18 citations

, , +16

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