How Rapid Isothermal Processing Can be a Dominant Semiconductor Processing Technology in the 21st Century - Concepedia

Concepedia

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How Rapid Isothermal Processing Can be a Dominant Semiconductor Processing Technology in the 21st Century

18

Citations

17

References

1996

Year

Rajendra Singh, R. Sharangpani, K. C. Cherukuri, Yingzhen Chen, D.M. Dawson, K.F. Poole, A. Rohatgi, Shankar Narayanan, R. P. S. Thakur

MRS Proceedings

Materials ScienceProcess IntensificationElectrical EngineeringEngineeringMaterial ProcessingRapid Isothermal ProcessingSemiconductor Device Fabrication21St CenturyThermodynamicsProcessing And ManufacturingHeat TransferElectronic PackagingThermal Processing

References

	Year	Citations

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