Shoko Manako

Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography

Ryohei Takei, Masao Suzuki, Emiko Omoda et al. · Applied Physics Letters · 2013 · 53 citations

Electrical Engineering, Engineering, Silicon Platform +10

Nanofabrication toward sub-10 nm and its application to novel nanodevices

J. Sone, Jun‐ichi Fujita, Yukinori Ochiai et al. · Nanotechnology · 1999 · 46 citations

Sub-10 Nm, Engineering, Electron-beam Lithography +21

Sub-1 dB/cm submicrometer-scale amorphous silicon waveguide for backend on-chip optical interconnect

Ryohei Takei, Shoko Manako, Emiko Omoda et al. · Optics Express · 2014 · 45 citations · Full text

Optical Materials, Engineering, Low Defect A-si +18

Calixarene Electron Beam Resist for Nano-Lithography

Jun‐ichi Fujita, Y. Ohnishi, Shoko Manako et al. · Japanese Journal of Applied Physics · 1997 · 40 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +19

Nanometer-Scale Patterning of Polystyrene Resists in Low-Voltage Electron Beam Lithography

Shoko Manako, Jun‐ichi Fujita, Yukinori Ochiai et al. · Japanese Journal of Applied Physics · 1997 · 29 citations

Engineering, Electron-beam Lithography, Organic Resist Nanopatterning +17