Shingo Sakamoto

Real-time monitoring of scattered laser light by a single particle of several tens of nanometers in the etching chamber in relation to its status with the equipment

Fumihiko Uesugi, Natsuko Ito, Tsuyoshi Moriya et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 41 citations

Natural Sciences, Electrical Engineering, Physics +14

Observation of the trajectories of particles in process equipment by an <i>in situ</i> monitoring system using a laser light scattering method

Natsuko Ito, Tsuyoshi Moriya, Fumihiko Uesugi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 31 citations

Natural Sciences, Physics, Instrumentation +9

Spin-Equilibrium Behavior in Solution of an Iron(III) Complex [Bis[3-(3-methoxysalicylideneamine)propyl]amino-<i>O</i>,<i>N</i>,<i>N</i>′,<i>N</i>″,<i>O</i>′](pyridine)iron(III) Tetraphenylborate

Akira Ohyoshi, Jukichi Honbo, Naohide Matsumoto et al. · Bulletin of the Chemical Society of Japan · 1986 · 24 citations · Full text

Natural Sciences, Chemistry, Inorganic Chemistry +16

Jungle-Gym Structured Films of Single-Walled Carbon Nanotubes on a Gold Surface: Oxidative Treatment and Electrochemical Properties

Masato Tominaga, Shingo Sakamoto, Hiroyuki Yamaguchi · The Journal of Physical Chemistry C · 2012 · 24 citations

Natural Sciences, Chemistry, Materials Science +17

Effect of electrically degenerated layer on the carrier transport property of ZnO epitaxial thin films

Shingo Sakamoto, Takeshi Oshio, Atsushi Ashida et al. · Applied Surface Science · 2008 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +14