Concepedia

H. R. Kim

HR

Statistics

Publications

1

Citations

11

H-Index

1

Active since

1993

Affiliations

Research Institute of Industrial Science and Technology(Current)

H. R. Kim is an author at Research Institute of Industrial Science and Technology specializing in etch rate, microelectronics, and selective etching.

Publications per year

1993–1993

1

Publications

1

Via hole process for GaAs monolithic microwave integrated circuit using two-step dry etching

MinKeun Chung, H. R. Kim, J. E. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 11 citations

Engineering, Electrical Engineering, Materials Engineering +17

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