1
Publications
11
Citations
1
H-Index
1993
Active since
Affiliations
J. E. Lee is an author at Research Institute of Industrial Science and Technology specializing in electronic packaging, microfabrication, and engineering.
Top concepts
EngineeringApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationIntegrated CircuitsElectronic PackagingMicrowave EngineeringElectrical Engineering
Publications per year
1993–1993
1
1
Via hole process for GaAs monolithic microwave integrated circuit using two-step dry etching
MinKeun Chung, H. R. Kim, J. E. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 11 citations
Ccl2f2 Gas, Electrical Engineering, Two-step Dry Etching +15
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