Concepedia

Erin Mitchell

EM

Statistics

Publications

4

Citations

109

H-Index

4

Active since

2002

Affiliations

University of Arizona(Current)

Erin Mitchell is an author at University of Arizona specializing in engineering, residence time, and slurry flow.

Publications per year

2002–2004

4

Publications

4

Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization

Ara Philipossian, Erin Mitchell · Japanese Journal of Applied Physics · 2003 · 46 citations

Engineering, Chemical Engineering, Manufacturing Engineering +14

Mean Residence Time and Removal Rate Studies in ILD CMP

Ara Philipossian, Erin Mitchell · Journal of The Electrochemical Society · 2004 · 24 citations

Engineering, Materials Engineering, Materials Science +14

Dispersion Number Studies in CMP of Interlayer Dielectric Films

Ara Philipossian, Erin Mitchell · Journal of The Electrochemical Society · 2003 · 21 citations

Engineering, Materials Engineering, Materials Science +16

Performing mean residence time analysis of CMP processes

Ara Philipossian, Erin Mitchell · International Symposium on Microarchitecture · 2002 · 18 citations

Engineering, Chemical Engineering, Process Systems Engineering +9

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