Jason Yang

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Active since

2012

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

KLA (United States)

Jason Yang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in throughput improvement, microelectronics, and electrical engineering.

Publications per year

2012–2013

Publications

Reflective electron-beam lithography: progress toward high-throughput production capability

Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations

Engineering, Electrical Engineering, Manufacturing Engineering +12

Reflective electron beam lithography: lithography results using CMOS controlled digital pattern generator chip

Thomas Gubiotti, Jeff Sun, Regina Freed et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

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